JPH029306B2 - - Google Patents
Info
- Publication number
- JPH029306B2 JPH029306B2 JP56076960A JP7696081A JPH029306B2 JP H029306 B2 JPH029306 B2 JP H029306B2 JP 56076960 A JP56076960 A JP 56076960A JP 7696081 A JP7696081 A JP 7696081A JP H029306 B2 JPH029306 B2 JP H029306B2
- Authority
- JP
- Japan
- Prior art keywords
- region
- active region
- impurity concentration
- high impurity
- source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 22
- 229910052710 silicon Inorganic materials 0.000 claims description 22
- 239000010703 silicon Substances 0.000 claims description 22
- 239000004065 semiconductor Substances 0.000 claims description 16
- 239000012535 impurity Substances 0.000 claims description 13
- 229910052594 sapphire Inorganic materials 0.000 claims description 9
- 239000010980 sapphire Substances 0.000 claims description 9
- 239000000758 substrate Substances 0.000 claims description 8
- 230000005669 field effect Effects 0.000 claims description 7
- 150000002500 ions Chemical class 0.000 description 18
- 235000012431 wafers Nutrition 0.000 description 12
- 238000005530 etching Methods 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 3
- AZBAQHIVVLQMFX-UHFFFAOYSA-N 4-(2,4-dimethylphenyl)-5-methyl-1,3-thiazol-2-amine Chemical compound S1C(N)=NC(C=2C(=CC(C)=CC=2)C)=C1C AZBAQHIVVLQMFX-UHFFFAOYSA-N 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- MUJOIMFVNIBMKC-UHFFFAOYSA-N fludioxonil Chemical compound C=12OC(F)(F)OC2=CC=CC=1C1=CNC=C1C#N MUJOIMFVNIBMKC-UHFFFAOYSA-N 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/403—Cells and electrode assemblies
- G01N27/414—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
Landscapes
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Biochemistry (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Engineering & Computer Science (AREA)
- Analytical Chemistry (AREA)
- Molecular Biology (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Measurement Of The Respiration, Hearing Ability, Form, And Blood Characteristics Of Living Organisms (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56076960A JPS57191540A (en) | 1981-05-21 | 1981-05-21 | Semiconductor field effect type ion sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56076960A JPS57191540A (en) | 1981-05-21 | 1981-05-21 | Semiconductor field effect type ion sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57191540A JPS57191540A (en) | 1982-11-25 |
| JPH029306B2 true JPH029306B2 (en]) | 1990-03-01 |
Family
ID=13620348
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56076960A Granted JPS57191540A (en) | 1981-05-21 | 1981-05-21 | Semiconductor field effect type ion sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57191540A (en]) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59171852A (ja) * | 1983-03-22 | 1984-09-28 | Nec Corp | 半導体イオンセンサ |
| JPH068800B2 (ja) * | 1985-02-20 | 1994-02-02 | 株式会社東芝 | 半導体センサ及びその製造方法 |
-
1981
- 1981-05-21 JP JP56076960A patent/JPS57191540A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57191540A (en) | 1982-11-25 |
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